The 76th JSAP Autumn Meeting, 2015

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[16p-4E-1~11] 7.3 Micro/Nano patterning and fabrication

Wed. Sep 16, 2015 1:45 PM - 4:45 PM 4E (437)

座長:山口 徹(NTT),岡田 真(兵庫県立大),柳下 崇(首都大)

4:00 PM - 4:15 PM

[16p-4E-9] Fabrication of ordered structures by nanoimprinting using anodic porous alumina

〇KAITO MURAKOSHI1, Takashi Yanagishita1, Masuda Hideki1 (1.Tokyo Metropolitan Univ.)

Keywords:nanoimprinting,anodic porous alumina