[12a-P12-1~7] 13.3 Insulator technology

▲ [12a-P12-3] Charge retention characteristics of charge trapping nonvolatile memories with silicon carbonitride (SiCN) dielectrics

〇(D)SheikhRashel Ahmed¹, Shinji Naito², Hironori Shibayama³, Jyunya Nakamura³, Kyoteru Kobayashi^{1, 2, 3} (1.GRAD SCH S&T, Tokai Univ, 2.GRAD SCH Eng, Tokai Univ, 3.SCH Eng, Tokai Univ.)

Keywords:Nonvolatile Memory,Silicon Carbonitride