[12a-P12-1~7] 13.3 Insulator technology

[12a-P12-4] Electrical Measurements of ALD-Al₂O₃ MOS Capacitors with Different Oxidants

〇RYO FUKUI¹, Yoshinori Nakamura¹, Kuniyuki Kakushima², Yoshinori Kataoka², Akira Nishiyama², Nobuyuki Sugii², Hitoshi Wakabayashi², Kazuo Tsutsui², Kenji Natori¹, Hiroshi Iwai¹ (1.Tokyo Tech.FRC, 2.Tokyo Tech.IGSSE)

Keywords:high-k,ALD,Al2O3