[12a-P12-1~7] 13.3 Insulator technology

[12a-P12-5] Penetration of ammonia molecules in silocon oxide layer with deficits

〇Tomoki Oku¹, Totsuka Masahiro¹, Shiga Toshihiko¹, Watanabe HItoshi¹ (1.Mitsubishi Electric)

Keywords:humidity resistance,silicon oxide,Molecular orbital calculation