The 62nd JSAP Spring Meeting, 2015

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15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects

[12p-A18-1~18] 15.8 Crystal evaluation, impurities and crystal defects

Thu. Mar 12, 2015 2:00 PM - 7:00 PM A18 (6A-208)

3:15 PM - 3:30 PM

[12p-A18-6] Effect of Low Carbon Concentration on Bulk Carrier Lifetime in MCZ Silicon Crystal (2)

〇Mitsuo Higasa1, Satoko Nakagawa1, Kazuhiko Kashima1, Yuta Nagai1 (1.GlobalWafers Japan)

Keywords:lifetime,silicon,carbon