9:30 AM - 9:45 AM
▲ [14a-A27-3] InGaAs quantum dot fabrication by a top-down approach for optical devices applications: effect of nanoscale etching mask
Keywords:Neutral beam,InGaAs,bio-nano-process
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 14, 2015 9:00 AM - 1:00 PM A27 (6A-202)
9:30 AM - 9:45 AM
Keywords:Neutral beam,InGaAs,bio-nano-process