10:15 AM - 10:30 AM
[14a-A27-6] Mechanism of transition metal etching process using neutral beam oxidation and complex reaction (2)
Keywords:etching of magnetic material,first-principles theoretical calculation,transition metal complex
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 14, 2015 9:00 AM - 1:00 PM A27 (6A-202)
10:15 AM - 10:30 AM
Keywords:etching of magnetic material,first-principles theoretical calculation,transition metal complex