10:30 AM - 10:45 AM
[14a-A27-7] Surface Rippling by Oblique Ion Incidence during Plasma Etching of Silicon: Experiments with Sheath Control Plates
Keywords:plasma etching,oblique ion incidence,surface rippling
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Sat. Mar 14, 2015 9:00 AM - 1:00 PM A27 (6A-202)
10:30 AM - 10:45 AM
Keywords:plasma etching,oblique ion incidence,surface rippling