[14a-A27-1~15] 8.4 Plasma etching

[14a-A27-6] Mechanism of transition metal etching process using neutral beam oxidation and complex reaction (2)

〇Tomohiro Kubota¹, Yoshiyuki Kikuchi¹, Seiji Samukawa^{1, 2} (1.IFS, Tohoku Univ., 2.WPI-AIMR, Tohoku Univ.)

Keywords:etching of magnetic material,first-principles theoretical calculation,transition metal complex