9:15 AM - 9:30 AM
△ [14a-B4-2] Anisotropy of Side-etching Rate in Electrochemical Etching of 4H-SiC
Keywords:SiC,MEMS,etching
Oral presentation
15 Crystal Engineering » 15.6 Group IV Compound Semiconductors
Sat. Mar 14, 2015 9:00 AM - 12:30 PM B4 (6B-104)
9:15 AM - 9:30 AM
Keywords:SiC,MEMS,etching