Haruka Suzuki

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:30 PM B7 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[15a-B7-1~14] 8.1 Plasma production and control

9:00 AM - 9:15 AM

△ [15a-B7-1] Microwave-Excited Pure N₂ Line Plasma Production under Atmospheric Pressure Using a Modified Waveguide Structure

〇Haruka Suzuki¹, Yuto Tamura¹, Hitoshi Itoh^1,2, Makoto Sekine¹, Masaru Hori¹, Hirotaka Toyoda¹ (1.Nagoya Univ., 2.Tokyo Electron Ltd.)