Kenji Teramoto

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 9:00 AM - 12:30 PM B7 (Exhibition Hall)

Oral presentation
| 8 Plasma Electronics
| 8.1 Plasma production and control

[15a-B7-1~14] 8.1 Plasma production and control

10:45 AM - 11:00 AM

[15a-B7-8] Scanning of Thermal-Plasma-Jet by Alternating Magnetic Field and Its Application to Semiconductor Substrate Annealing

〇Kenji Teramoto¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)