Kumiko Konishi

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:45 PM - 7:00 PM C302 (Nikko Houou)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15p-C302-1~18] 15.6 Group IV Compound Semiconductors (SiC)

5:30 PM - 5:45 PM

[15p-C302-13] Investigation of process induced defects in 4H-SiC epitaxial layers

〇Kumiko Konishi¹, Ryusei Fujita¹, Yuki Mori¹, Akio Shima¹, Yasuhiro Shimamoto¹ (1.Hitachi, Ltd. R&D Group)