Yuuki Inoue

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Speaker, Author, Co-Author

Thu. Sep 15, 2016 1:45 PM - 7:00 PM C302 (Nikko Houou)

Oral presentation
| 15 Crystal Engineering
| 15.6 Group IV Compound Semiconductors (SiC)

[15p-C302-1~18] 15.6 Group IV Compound Semiconductors (SiC)

2:15 PM - 2:30 PM

△ [15p-C302-2] Thinning of SiC Wafer by sub-atmospheric plasma etching with high concentration of SF₆

〇Yuuki Inoue¹, Koki Tajiri¹, Yasuhisa Sano¹, Satoshi Matsuyama¹, Kazuto Yamauchi¹ (1.Osaka Univ.)