Takashi Yajima

→ Search for Takashi Yajima in Google Scholar

Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

11:30 AM - 11:45 AM

[16a-B10-11] Cleanroom-Free Environment Control System for Minimal PLAD

〇Takashi Yajima^1,2, Masaharu Yasui^1,2, Sommawan Khumpuang^1,2, Hitoshi Maekawa^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)

11:45 AM - 12:00 PM

[16a-B10-12] Characterization of Environment for Minimal Fab

〇Takashi Yajima^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.Minimal Fab)