Shintaro Otsuka

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

10:45 AM - 11:00 AM

[16a-B10-8] Influence of Rapid Thermal Annealing on Structures of Ge Thin Films Grown at Low Temperature

〇Shintaro Otsuka¹, Mori Takahiro¹, Morita Yukinori¹, Uchida Noriyuki¹, Liu Yongxun¹, O'uchi Shin-ichi¹, Fuketa Hiroshi¹, Migita Shinji¹, Masahara Meisyoku¹, Matsukawa Takashi¹ (1.AIST)

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