Yuuki Ishida

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Speaker, Author, Co-Author

Fri. Sep 16, 2016 1:45 PM - 5:00 PM B10 (Exhibition Hall)

Oral presentation
| 13 Semiconductors
| 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[16p-B10-1~12] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

2:00 PM - 2:15 PM

[16p-B10-2] Effect of thermal convection on the Minimal Si-CVD equipment (II)

〇Yuuki Ishida^1,2, Takanori Mikahara^1,2, Noriko Miura², Takahiro Ito³, Shinichi Ikeda^1,2, Hitoshi Habuka⁴, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.ORIENTAL MOTER Co, 4.YNU)

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