9:30 AM - 9:45 AM
[13a-D61-3] Systematic Study of the Response of Resist Materials Based on Noria Derivatives Modified with Various Protection Ratios of Acetal Moieties to Electron Beam Irradiation
Keywords:electron beam, molecular resists, chemically amplified resists
In this study, we synthesized positive-tone chemically amplified molecular resist materials modified with various ratios of cyclohexyl vinyl ether based on noria. Also, their performances as positive-tone electron beam (EB) resist materials were investigated. The physical properties of the noria-CHVEs with various protection ratios of CHVE groups were examined, and their patterning properties were also investigated using an EB exposure tool.