The 77th JSAP Autumn Meeting, 2016

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7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)

Toshiyuki Horiuchi(Tokyo Denki Univ.), Yoshihiko Hirai(Osaka Pref. Univ.), Jun Taniguchi(Tokyo Univ. of Sci.), Hiroaki Oizumi(GIGAPHOTON)

10:15 AM - 10:30 AM

[13a-D61-6] Fabrication of Silicon Nano-wall

〇atsushi shinozuka1, Xuejun Xu1, Kentarou Sawano1, Shuhei Yoshiba2, Masakazu Hirai2, Yukimi Ichikawa1,2, Makoto Konagai1,2 (1.Tokyocity Univ., 2.JST)

Keywords:Silicon Nano-wall, solar cell