The 77th JSAP Autumn Meeting, 2016

Presentation information

Oral presentation

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)

Toshiyuki Horiuchi(Tokyo Denki Univ.), Yoshihiko Hirai(Osaka Pref. Univ.), Jun Taniguchi(Tokyo Univ. of Sci.), Hiroaki Oizumi(GIGAPHOTON)

11:15 AM - 11:30 AM

[13a-D61-9] Preparation of Polymer Through-Hole Membranes by Nanoimprinting

Takashi Yanagishita1, Toko Tamura1, Toshiaki Kondo1, Hideki Masuda1 (1.Tokyo Metropolitan Univ.)

Keywords:nanoimprint, anodic porous alumina, Polymer through-hole membrane