Oral presentation

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

Tue. Sep 13, 2016 9:00 AM - 12:15 PM D61 (Bandaijima Bldg.)

Toshiyuki Horiuchi(Tokyo Denki Univ.), Yoshihiko Hirai(Osaka Pref. Univ.), Jun Taniguchi(Tokyo Univ. of Sci.), Hiroaki Oizumi(GIGAPHOTON)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

+Add all to schedule

9:00 AM - 9:15 AM

[13a-D61-1] Fabrication of Cylindrical Micro-Parts Using Synchronous Scan-Projection Lithography and Chemical Etching

〇Kaiki Ito¹, Yuta Suzuki¹, Toshiyuki Horiuti¹ (1.Tokyo Denki Univ.)

9:15 AM - 9:30 AM

[13a-D61-2] Evaluation of Projection Exposure System Using High-Intensity Light Emitting Diodes and Squared Optical Fibers

〇Yuta Suzuki¹, Jun Watanabe¹, Jun-ya Iwasaki¹, Toshiyuki Horiuchi¹ (1.Tokyo Denki Univ.)

9:30 AM - 9:45 AM

[13a-D61-3] Systematic Study of the Response of Resist Materials Based on Noria Derivatives Modified with Various Protection Ratios of Acetal Moieties to Electron Beam Irradiation

〇Hiroki Yamamoto¹, Hiroto Kudo², Kozawa Takahiro¹ (1.ISIR, Osaka Univ., 2.Kansai Univ.)

9:45 AM - 10:00 AM

△ [13a-D61-4] TMAH Developer Intrusion into Resist Film Analyzed by C-V Method of MIS Structure

〇Hodaka Shirataki¹, Akira Kawai¹ (1.Nagaoka Univ. Tech.)

10:00 AM - 10:15 AM

△ [13a-D61-5] Gas Trap Sysytem in Micro Cone Shape Tube

〇(M1)Katsuaki Yamane¹, Tomohiro Maruyama¹, Akira Kawai¹ (1.Nagaoka Univ. Tech.)

10:15 AM - 10:30 AM

[13a-D61-6] Fabrication of Silicon Nano-wall

〇atsushi shinozuka¹, Xuejun Xu¹, Kentarou Sawano¹, Shuhei Yoshiba², Masakazu Hirai², Yukimi Ichikawa^1,2, Makoto Konagai^1,2 (1.Tokyocity Univ., 2.JST)

10:45 AM - 11:00 AM

△ [13a-D61-7] Self-assembled 2D nanogap arrays by magnetic assembly

〇Shoya Takidani¹, Kanna Aoki¹, Minoru Fujii¹ (1.Kobe Univ.)

11:00 AM - 11:15 AM

[13a-D61-8] Biomimetic Design for Improvement of Fluid Properties of Diffuser

〇Mariko Miyazaki¹, Yuji Hirai², Hiroshi Moriya¹, Masatsugu Shimomura², Akihiro Miyauchi¹ (1.Hitachi Ltd., 2.Chitose Inst.)

11:15 AM - 11:30 AM

[13a-D61-9] Preparation of Polymer Through-Hole Membranes by Nanoimprinting

〇Takashi Yanagishita¹, Toko Tamura¹, Toshiaki Kondo¹, Hideki Masuda¹ (1.Tokyo Metropolitan Univ.)

11:30 AM - 11:45 AM

△ [13a-D61-10] The effect of atmosphere and interfacial state on atomic-scale transcription onto the polymer surface by thermal nanoimprint

〇Taichiro Kinoshita¹, Kodai Shimada¹, Koji Koyama², Masahiro Mita³, Satoru Kaneko^4,1, Akifumi Matsuda¹, Mamoru Yoshimoto¹ (1.Tokyo Inst. of Tech, 2.Namiki Precision Jewel Co., Ltd., 3.KYODO INTERNATIONAL, INC., 4.Kanagawa Ind. Tech. Cent.)

11:45 AM - 12:00 PM

[13a-D61-11] Computational study of material optimization on de-molding process in nanoimprint lithography

Florian Chalvin^1,2, Masaaki Yasuda¹, Hiroaki Kawata¹, 〇Yoshihiko Hirai¹ (1.Osaka Pref. Univ., 2.Ecole Nat. Sup. Elec. Appl.)

12:00 PM - 12:15 PM

[13a-D61-12] The characteristics of repeated transfer durability in the UV-NIL using a release agent-free replica mold

〇Jun Taniguchi¹, Gen Nakagawa¹, Shin Hiwasa² (1.Tokyo Univ. of Sci., 2.Autex)

Poster presentation

[14p-P16-1~8] 7.3 Micro/Nano patterning and fabrication

Wed. Sep 14, 2016 4:00 PM - 6:00 PM P16 (Exhibition Hall)

△：Presentation by Applicant for JSAP Young Scientists Presentation Award
▲：English Presentation
▼：Both of Above
No Mark：None of Above

+Add all to schedule

4:00 PM - 6:00 PM

[14p-P16-1] Control of upward growth on the three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

〇Mizue Sekine¹, Etsuo Maeda¹, Reo Kometani¹ (1.The Univ. of Tokyo)

4:00 PM - 6:00 PM

△ [14p-P16-2] Self-Assembled Network (SAN) Structure Formed in Photoresist Film by Spin Coating Method

〇(M1)Tomohiro Maruyama¹, Hiroki Nakano¹, Akira Kawai¹ (1.Nagaoka Univ. Tech.)

4:00 PM - 6:00 PM

[14p-P16-3] Dielectric Dispersion Analysis of Resist Materials used for lithography

〇Hodaka Shirataki¹, Akira Kawai¹, Shogo Ohtani¹, Hiroki Sasazaki¹ (1.Nagaoka Univ. Tech.)

4:00 PM - 6:00 PM

[14p-P16-4] Pattern Formation by EB/UV Hybrid Lithography

Akira Kawai¹, 〇(M1)Tomohiro Maruyama¹, Hiroki Nakano¹ (1.Nagaoka Univ. Tech.)

4:00 PM - 6:00 PM

▲ [14p-P16-5] Gas sensor based on ZnO film/ silica nanopillars

〇Jing Liu¹, Futing Yi¹ (1.BSRF, IIHEP, CAS)

4:00 PM - 6:00 PM

△ [14p-P16-6] Fabrication of micro heater/channel device

〇(M1C)Kazuho Kai¹, Akira Kawai¹ (1.Nagaoka Univ. Tech.)

4:00 PM - 6:00 PM

△ [14p-P16-7] Bubble Trap Analysis for Smooth Fluid Flowing in Micro Channel / Tube Network

〇(M1C)Natsumi Yagi¹, Akira Kawai¹ (1.Nagaoka Univ. Tech.)

4:00 PM - 6:00 PM

△ [14p-P16-8] Zeta potential of fine bubble and particle by light scattering method

〇Yuta Kishii¹, Akira Kawai¹ (1.Nagaoka Univ. Tech.)

Sessions

7 Beam Technology and Nanofabrication » 7.3 Micro/Nano patterning and fabrication

[13a-D61-1~12] 7.3 Micro/Nano patterning and fabrication

[13a-D61-1] Fabrication of Cylindrical Micro-Parts Using Synchronous Scan-Projection Lithography and Chemical Etching

[13a-D61-2] Evaluation of Projection Exposure System Using High-Intensity Light Emitting Diodes and Squared Optical Fibers

[13a-D61-3] Systematic Study of the Response of Resist Materials Based on Noria Derivatives Modified with Various Protection Ratios of Acetal Moieties to Electron Beam Irradiation

△ [13a-D61-4] TMAH Developer Intrusion into Resist Film Analyzed by C-V Method of MIS Structure

△ [13a-D61-5] Gas Trap Sysytem in Micro Cone Shape Tube

[13a-D61-6] Fabrication of Silicon Nano-wall

△ [13a-D61-7] Self-assembled 2D nanogap arrays by magnetic assembly

[13a-D61-8] Biomimetic Design for Improvement of Fluid Properties of Diffuser

[13a-D61-9] Preparation of Polymer Through-Hole Membranes by Nanoimprinting

△ [13a-D61-10] The effect of atmosphere and interfacial state on atomic-scale transcription onto the polymer surface by thermal nanoimprint

[13a-D61-11] Computational study of material optimization on de-molding process in nanoimprint lithography

[13a-D61-12] The characteristics of repeated transfer durability in the UV-NIL using a release agent-free replica mold

[14p-P16-1~8] 7.3 Micro/Nano patterning and fabrication

[14p-P16-1] Control of upward growth on the three-dimensional nanostructure fabrication by focused-ion-beam chemical vapor deposition

△ [14p-P16-2] Self-Assembled Network (SAN) Structure Formed in Photoresist Film by Spin Coating Method

[14p-P16-3] Dielectric Dispersion Analysis of Resist Materials used for lithography

[14p-P16-4] Pattern Formation by EB/UV Hybrid Lithography

▲ [14p-P16-5] Gas sensor based on ZnO film/ silica nanopillars

△ [14p-P16-6] Fabrication of micro heater/channel device

△ [14p-P16-7] Bubble Trap Analysis for Smooth Fluid Flowing in Micro Channel / Tube Network

△ [14p-P16-8] Zeta potential of fine bubble and particle by light scattering method

Authentication