The 77th JSAP Autumn Meeting, 2016

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Symposium (Oral)

Symposium » Recent topics of point defects in semicondoctor crystals

[13p-B8-1~10] Recent topics of point defects in semicondoctor crystals

Tue. Sep 13, 2016 1:45 PM - 6:00 PM B8 (Exhibition Hall)

Toshiaki Ono(SUMCO), Kentaro Kutsukake(Tohoku Univ.)

2:45 PM - 3:15 PM

[13p-B8-3] Control of point defects in Si wafer by ultrahigh-temperature RTP technique

〇Koji Araki1, Haruo Sudo1, Tatsuhiko Aoki1, Susumu Maeda1 (1.GlobalWafers Japan)

Keywords:Cz-Si crystal, Rapid thermal processing, Point defect