9:15 AM - 9:30 AM
[15a-B10-2] High Speed Crystallization of Silicon Thin Films Induced by High Power Atmospheric Pressure Thermal-Plasma-Jet Irradiation
Keywords:Atmospheric Pressure Thermal-Plasma-Jet, Crystallization
Presentation information
Oral presentation
13 Semiconductors » 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology
[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology
Thu. Sep 15, 2016 9:00 AM - 12:15 PM B10 (Exhibition Hall)
Wenchang Yeh(Shimane Univ.), Tatsuya Okada(Univ. of the Ryukyus)