[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

[15a-B10-3] Improvement of Transfer Yield of Single-crystalline
Silicon Films and Fabrication of
Thin-film Transistors and Inverters on Flexible Substrate

〇Ryutatsu Mizukami¹, Shinji Takashima¹, Tomonori Yamashita¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

Keywords:transfer, thin-film transistor, flexible electronics