[15a-B10-1~13] 13.4 Si wafer processing /Si based thin film /MEMS/Integration technology

△ [15a-B10-5] Demonstration of a flexible TFT with a crystalline Ge layer

〇hidenori higashi¹, Mario Nakano¹, Kohei Kudo¹, Yuichi Fujita¹, Shinya Yamada¹, Takeshi Kanashima¹, Isao Tsunoda², Hiroshi Nakashima³, Kohei Hamaya¹ (1.Osaka Univ., 2.NIT, Kumamoto College., 3.KASTEC, Kyushu Univ.)

Keywords:thin-film-transistor, germanium, flexible electronics