[15p-B3-1~12] 13.2 Exploratory Materials, Physical Properties, Devices

△ [15p-B3-5] Diffusion Analysis of Oxidation Process in β-FeSi₂/Si Nanocomposite

〇Mikihiro Arima¹, Masaya Fuchi¹, Kazumasa Narumi², Yoshihito Maeda^1,2 (1.Kyutech, 2.QST)

Keywords:beta-FeSi2, oxidation, light emission

In order to overcome the most disadvantage of β-FeSi₂/Si (β/Si) nanocomposite for light emission efficiency, β-FeSi₂/SiO₂ composites promising for efficient confinement of electrons and holes was proposed and synthesized by selective oxidation taking place in the β/Si composite. In the oxidized composite, we observed clear photoluminescence at 250 K. In this study, we investigated details of the oxidation processes from the β/Si composite to the β/SiO₂ composite by using RBS analysis and was discussed using element diffusion flux.