[15p-P7-1~2] 8.4 Plasma etching

[15p-P7-1] Effect of Oxygen Plasma Irradiation on AlGaN Surface Properties

〇Masahito Niibe¹, Retsuo Kawakami², Yoshitaka Nakano³, Ryo Tanaka¹, Yuma Araki¹, Chisato Azuma², Takashi Mukai⁴ (1.Univ. Hyogo, 2.Tokushima Univ., 3.Chubu Univ., 4.Nichia Corp.)

Keywords:Oxygen plasma, Damage, AlGaN