Observation of DC-bias-dependency of local DLTS image related to SiO<sub>2</sub>/SiC interface defects

Presentation information

Oral presentation

15 Crystal Engineering » 15.6 Group IV Compound Semiconductors (SiC)

Fri. Sep 16, 2016 9:00 AM - 12:15 PM C302 (Nikko Houou)

Koji Kita(Univ. of Tokyo)

10:45 AM - 11:00 AM

〇Norimichi Chinone¹, Ryoji Kosugi², Yasunori Tanaka², Shinsuke Harada², Hajime Okumura², Yasuo Cho¹ (1.Tohoku Univ., 2.AIST)

Keywords:MOS Interface, SPM, SNDM