Shigehisa Shibayama

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:15 PM S221 (S2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[20p-S221-1~17] 13.3 Insulator technology

5:45 PM - 6:00 PM

[20p-S221-16] Evolution of uniform ferroelectric phase in polymorph HfO₂ film

〇Shigehisa Shibayama^1,2, Lun Xu¹, Shinji Migita³, Akira Toriumi¹ (1.The Univ. of Tokyo, 2.JSPS research fellow, 3.AIST)

6:00 PM - 6:15 PM

[20p-S221-17] Decay of polarization domain in ferroelectric HfO₂ film

〇Shigehisa Shibayama^1,2, Lun Xu¹, Shinji Migita³, Akira Toriumi¹ (1.The Univ. of Tokyo, 2.JSPS research fellow, 3.AIST)