Yasuo Shimizu

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Speaker, Author, Co-Author

Sun. Mar 20, 2016 1:45 PM - 6:15 PM S221 (S2)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[20p-S221-1~17] 13.3 Insulator technology

2:15 PM - 2:30 PM

[20p-S221-3] Hydrogen Distribution Analysis in Al₂O₃ Film -Dependence of Annealing Temperature-

〇Yasuo Shimizu¹, Bin Han¹, Yuan Tu¹, Koji Inoue¹, Fumiko Yano², Masao Inoue³, Yorinobu Kunimune⁴, Yasuhiro Shimada⁴, Toshiharu Katayama⁴, Takashi Ide⁴, Yasuyoshi Nagai¹ (1.IMR Tohoku Univ., 2.Tokyo Inst. Tech., 3.Renesas, 4.RSMC)