Hiroyoshi Imadate

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Speaker, Author, Co-Author

Mon. Mar 21, 2016 9:00 AM - 12:15 PM W541 (W5)

Oral presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[21a-W541-1~12] 13.8 Compound and power electron devices and process technology

10:00 AM - 10:15 AM

[21a-W541-5] Mapping of ICP-etching induced damages on GaN surfaces using scanning internal photoemission microscopy

〇Hiroyoshi Imadate¹, Akihisa Terano¹, Kenji Shiojima¹ (1.Univ. of Fukui)