[19p-S223-1~10] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

△ [19p-S223-5] The research of quantification of carrier density by dC/dV and dC/dz measurement with Scanning Nonlinear Dielectric Microscopy

〇Bin Liu¹, Yoshiomi Hiranaga¹, Norimichi Chinone¹, Yasuo Cho¹ (1.Tohoku Univ.)

Keywords:carrier density profile,scanning probe microscopy,scanning nonlinear dielectric microscopy