The 63rd JSAP Spring Meeting, 2016

Presentation information

Print

Oral presentation

15 Crystal Engineering » 15.4 III-V-group nitride crystals

[20p-H121-1~24] 15.4 III-V-group nitride crystals

Sun. Mar 20, 2016 1:15 PM - 7:45 PM H121 (H)

Tsutomu Araki(Ritsumeikan Univ.), Mitsuru Funato(Kyoto Univ.), Takeyoshi Onuma(Kogakuin Univ.)

7:30 PM - 7:45 PM

[20p-H121-24] Fabrication of GaN with reverse mesa pattern by inductive coupled plasma reactive ion etching

〇(M1)Norihiro Itagaki1, Nagatoshi Kei1, Okada Narihito1, Inomoto Ryou1, Nishimiya Tomoharu2, Matsuo Humiharu2, Tadatomo Kazuyuki1 (1.Yamaguchi Univ., 2.SAMCO Corp.)

Keywords:GaN,mesa