[20p-P13-1~14] 13.2 Exploratory Materials, Physical Properties, Devices

[20p-P13-1] Fabrication of high-quality Er₂O₃ thin film using ion beam sputter deposition method

〇masaya fujita^1,2, Hidehito Asaoka², Kenji Yamaguchi² (1.Ibaraki Univ., 2.Japan Atomic Energy Agency)

Keywords:sputter etching,ion irradiation,thin film