The 63rd JSAP Spring Meeting, 2016

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Poster presentation

13 Semiconductors » 13.8 Compound and power electron devices and process technology

[20p-P9-1~22] 13.8 Compound and power electron devices and process technology

Sun. Mar 20, 2016 1:30 PM - 3:30 PM P9 (Gymnasium)

1:30 PM - 3:30 PM

[20p-P9-10] Electrical Characterization of n-GaN Films Treated by CF4 Plasma

〇Yoshitaka Nakano1, Yusuke Sakai1, Masahito Niibe2, Retsuo Kawakami3 (1.Chubu Univ., 2.Univ. Hyogo, 3.Tokushima Univ.)

Keywords:nitride semconductor,plasma damage,CF4