The 63rd JSAP Spring Meeting, 2016

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8 Plasma Electronics » 8.3 Deposition of thin film and surface treatment

[22a-W611-1~14] 8.3 Deposition of thin film and surface treatment

Tue. Mar 22, 2016 9:00 AM - 12:45 PM W611 (W6)

Jaeho Kim(AIST)

9:15 AM - 9:30 AM

[22a-W611-2] Low-temperature Formation of a-IGZO Thin Film Transistors with Plasma Enhanced Reactive Sputtering

Yuichi Setsuhara1, Keitaro Nakata1, Yoshikatsu Satake1, 〇Kosuke Takenaka1, Giichiro Uchida1, Akinori Ebe2 (1.Osaka Univ., 2.EMD Corp.)

Keywords:IGZO,Sputtering