Riku Nakashima

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Speaker, Author, Co-Author

Wed. Sep 6, 2017 4:00 PM - 6:00 PM PA8 (P)

Poster presentation
| 13 Semiconductors
| 13.8 Compound and power electron devices and process technology

[6p-PA8-1~31] 13.8 Compound and power electron devices and process technology

4:00 PM - 6:00 PM

[6p-PA8-3] PL lifetime measurement for AlGaN epitaxial films via plasma etching treatment and Al₂O₃-ALD process

〇Riku Nakashima¹, Takuma Mori¹, Daiki Hosomi¹, Takashi Egawa¹, Makoto Miyoshi¹ (1.Nagoya Institute of Technology)