Takumi Agatuma

→ Search for Takumi Agatuma in Google Scholar

Speaker, Author, Co-Author

Tue. Sep 5, 2017 1:45 PM - 4:30 PM C11 (Office 1)

Oral presentation
| 13 Semiconductors
| 13.3 Insulator technology

[5p-C11-1~10] 13.3 Insulator technology

6.1と13.3と13.5のコードシェアセッションあり

3:00 PM - 3:15 PM

[5p-C11-5] Surface roughness increase induced by step etching of SiO₂ film on Si

〇(M1)Takumi Agatuma¹ (1.Univ. of Tsukuba)