9:00 AM - 9:15 AM
〇Hiromasa Ohmi1, Jumpei Sato1, Yusuke Kubota2, Tatsuya Hirano1, Hiroaki Kakiuxhi1, Kiyoshi Yasutake1 (1.Osaka Univ., 2.Tokyo Electron LTD.)
Oral presentation
8 Plasma Electronics » 8.4 Plasma etching
Thu. Sep 7, 2017 9:00 AM - 11:45 AM A402 (402+403)
Hisataka Hayashi(TOSHIBA)
△:奨励賞エントリー
▲:英語発表
▼:奨励賞エントリーかつ英語発表
空欄:どちらもなし
9:00 AM - 9:15 AM
〇Hiromasa Ohmi1, Jumpei Sato1, Yusuke Kubota2, Tatsuya Hirano1, Hiroaki Kakiuxhi1, Kiyoshi Yasutake1 (1.Osaka Univ., 2.Tokyo Electron LTD.)
9:15 AM - 9:30 AM
〇Tomoko Ito1, Karahashi Kazuhiro1, Hamaguchi Satoshi1 (1.Osaka Univ.)
9:30 AM - 9:45 AM
〇HU LI1, Tomoko Ito1, Kazuhiro Karahashi1, Masanaga Fukasawa2, Akiko Hirata2, Nagahata Kazunori2, Tetsuya Tatsumi2, Satoshi Hamaguchi1 (1.Osaka Univ., 2.Sony)
9:45 AM - 10:00 AM
〇Kazuhiro Karahashi1, Tomoko Ito1, Satoshi Hamaguchi1 (1.Osaka Univ.)
10:00 AM - 10:30 AM
〇Hitoshi Kuninaka1 (1.JAXA)
10:30 AM - 10:45 AM
〇Azumi Ito1, Hirotoshi Inui1, Hirokazu Matsumoto1 (1.Zeon Corporation)
10:45 AM - 11:00 AM
〇Naoki Takeda1, Yan Zhang1, Toshio Hayashi1, Makoto Sekine1, Hiroki Kondo1, Kenji ishikawa1, Masaru Hori2 (1.Nagoya Univ. Eng., 2.Nagoya Univ. Inst. Innovation for Future Society)
11:00 AM - 11:15 AM
〇Yuki Kondo1, Itaru Fujita1, Satoshi Degai1, Tsuyoshi Tanimoto1, Toru Harigai1, Yoshiyuki Suda1, Hirofumi Takikawa1, Hidenobu Gonda2, Yasuhiro Hadano3, Masao Kamiya4 (1.Toyohashi Univ. Technol, 2.OSG Corp., 3.Kojima Ind. Corp., 4.Itoh Opt. Ind. co., Ltd.)
11:15 AM - 11:30 AM
〇(M2)Gento Kuroda1, Kazuo Takahashi1, Koji Nishio1 (1.Kyoto Inst. of Tech)
11:30 AM - 11:45 AM
〇Kenji Ishikawa1, Zecheng Liu1, Masato Imamura1, Takayoshi Tsutsumi1, Hiroki Kondo1, Osamu Oda1, Makoto Sekine1, Masaru Hori1 (1.Nagoya University)
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