Study of Connected Lower Voltage Micro EHD Pump

Tasuku Sato; Shingo Maeda; Yoko Yamanishi

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[6a-C21-1~12] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Wed. Sep 6, 2017 9:15 AM - 12:15 PM C21 (C21)

Kazuyoshi Ueno(Shibaura Inst. of Tech), Masahide Goto(NHK)

11:45 AM - 12:00 PM

[6a-C21-11] Study of Connected Lower Voltage Micro EHD Pump

〇(M2)Tasuku Sato¹, Shingo Maeda¹, Yoko Yamanishi² (1.Shibaura Inst., 2.Kyushu Univ.)

Keywords:Electrohydrodynamics, Micro channel

In this research, we designed and developed pumps without mechanical parts by using Electrohydrodynamics. The feature of developed EHD pump is that connecting units can take out the largely pressure by at low voltage. This research contributes to the development of a compact and simple chemical actuator.