〇Yusuke Omata¹, Takashi Aoki¹, Tomokazu Sasaki², Tomohisa Mizuno¹ (1.Kanagawa Univ., 2.Toshiba Nanoanalysis Corp.)

〇Shinji Nakada¹, Masaki Yamamoto¹, Sho Irie¹, Yusuke Omata¹, Takashi Aoki¹, Toshiyuki Sameshima², Tomohisa Mizuno¹ (1.Kanagawa Univ., 2.Tokyo Univ Agri. Tech.)

〇Tamon Kunieda¹, Toru Watanabe¹, Mai Hong Minh¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)

〇Toru Watanabe¹, Mai Hong Minh¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)

〇Tatsurou Sagawa¹, Nakamura Masayuki¹, Kobayashi Takayuki¹, Tatsuta Toshiaki¹, Motoyama Shin-ich¹ (1.Samco Inc)

〇Ryutaro Suda¹, Akira Kojima¹, Jun-ichi Shirakashi¹, Nobuyoshi Koshida¹ (1.Tokyo Univ. of Agri. & Technol.)

〇Hiromasa Ohmi¹, Tatuya Hirono¹, Yusuke Kubota², Yoshiki Sirasu¹, Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹ (1.Osaka Univ., 2.Tokyo Electron LTD.)

〇Mamiko Yagi¹, Jun-ichi Shirakashi¹ (1.Tokyo Univ. of A. & T.)

〇(M2)Koichi Kido¹, Daisuke Ando¹, Yuji Suto¹, Junichi Koike¹ (1.Tohoku Univ.)

〇Yoshiyuki Watanabe¹, Toru Yahagi¹, Yutaka Abe¹, Hiroki Murayama¹ (1.Yamagata Inst. Tech.)

〇(M2)Tasuku Sato¹, Shingo Maeda¹, Yoko Yamanishi² (1.Shibaura Inst., 2.Kyushu Univ.)

Katsuki Tsukasaki¹, Shinya Kumagai¹, 〇Minoru Sasaki¹ (1.Toyota Technol. Inst.)

〇Kenta Irikura¹, Watanabe Toru¹ (1.Yokohama Nat. Univ.)

〇AYAMI YAMADA¹, Hitoshi Habuka¹ (1.Yokohama Nat. Univ.)

〇(M2)Norihisa Takei¹, Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹, Hiromasa Ohmi¹ (1.Osaka Univ.)

〇Hiroyuki Tanaka^1,2, Hisato Ogiso^1,2, Shizuka Nakano^1,2, Yoshiyuki Nozawa³, Toshihiro Hayami³, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.SPPT)

Miya Matsuo¹, 〇Mitsuko Muroi¹, Ning Li¹, Hitoshi Habuka¹, Takanori Mikahara^2,3, Shin-ichi Ikeda^2,3, Yuuki Ishida^2,3, Shiro Hara^2,3 (1.Yokohama Nat. Univ., 2.MINIMAL, 3.AIST)

〇Takanori Mikahara^1,2, Yuuki Ishida², Takahiro Ito³, Noriko Miura¹, Shinichi Ikeda², Hitoshi Habuka⁴, Sommawan Khumpuang², Shiro Hara² (1.MINIMAL, 2.AIST, 3.ORIENTAL MOTOR Co, 4.Yokohama National Univ.)

〇Tetsuya Goto¹, Kei-ichiro Sato², Yuki Yabuta³, Shigetoshi Sugawa¹, Shiro Hara^4,5 (1.Tohoku Univ., 2.Kotec Co., LTD., 3.Seinan Industries Co., LTD., 4.AIST, 5.MINIMAL)

〇kazushige sato^1,3, Takashi Chiba^1,3, Masao Terada^1,3, Shinichi Ikeda^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.Minimal Fab General Incorporated Association, 2.AIST, 3.Sakaguchi E.H VOC Corp)

〇Kazuhiro Koga^1,2, Fumito Imura^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Noriko Miura^1,2, Takeshi Aizawa², Fumito Imura^1,3, Takeshi Yamada², Mitsunori Nogawa², Yasuhiro Onishi², Tatsuo Ishijima⁴, Hiroaki Suzuki⁴, Taishin Shimada⁴, Sommawan Khumpuang^1,3, Shiro Hara^1,3 (1.MINIMAL, 2.YONEKURA, 3.AIST, 4.KANAZAWA UNIVERSITY)

〇Hiroki Kamehama¹, Satoshi Fujii^1,2, Toonoe Haruki³ (1.N.I.T, Okinawa Coll., 2.Tokyo Tech, 3.Yokogawa Solution Serviece Corp.)

〇Sommawan Khumpuang^1,2, Norio Umeyama^1,2, Hiroyuki Tanaka^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇AnhTuan Phan^1,2, Hiroyuki Tanaka^1,3, Norio Umeyama^1,3, Noriko Miura^1,3, Khumpuang Sommawan^1,3, Shiro Hara^1,3 (1.Minimal Fab, 2.SHTPLabs, 3.AIST)

〇Yongxun Liu¹, Hiroyuki Tanaka¹, Norio Umeyama¹, Sommawan Khumpuang¹, Masayoshi Nagao¹, Takashi Matsukawa¹, Shiro Hara¹ (1.AIST)

〇Norio Umeyama^1,2, Noriko Miura², Fumito Imura^1,2, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Masao Yoshioka¹, Yosuke Tanaka¹, Ryoichi Irita¹, Shinya Yoshida¹, Norio Umeyama^2,3, Sommawan Khumpuang^2,3, Shiro Hara^2,3 (1.PMT, 2.AIST, 3.MINIMAL)

〇Norio Umeyama^1,2, Takaaki Sakai³, Atsushi Kajikura³, Kouichiro Ichikawa³, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL, 3.Fujikoshi Machinery)

〇Fumito Imura^1,2, Michihiro Inoue¹, Arami Saruwatari¹, Sommawan Khumpuang^1,2, Shiro Hara^1,2 (1.AIST, 2.MINIMAL)

〇Takashi Yajima¹, Masaharu Yasui¹, Sommawan Khumpuang¹, Hitoshi Maekawa¹, Shiro Hara¹ (1.AIST)

〇Akira Ishibashi^1,5,6, Junji Matsuda², Nobutoshi Noguchi³, Tsukio Etoh⁴, Yoshihisa Ohashi⁵, Shiro Hara⁶ (1.RIES, Hokkaido Univ., 2.Hiei Kensetsu, 3.Ishibashi Arch. Assc, 4.Kindai Setsubi Skkei, 5.CsTEC Corp., 6.AIST)

〇Shunsuke Hatanaka¹, Hongmiao Gao², Takayuki Sugino², Masaya Sasaki², Masanobu Miyao², Taizo Sadoh² (1.Kyushu Univ. EECS, 2.Kyushu Univ. ISEE)

〇Kazuki Yagi¹, Hongmiao Gao², Takayuki Sugino², Masanobu Miyao², Taizo Sadoh² (1.Kyushu Univ. EECS, 2.Kyushu Univ. ISE)

〇Ryota Yoshimine¹, Kaoru Toko¹, Takashi Suemasu¹ (1.Univ. of Tsukuba)

〇Daichi Takahara¹, Kaoru Toko¹, Ryota Yoshimine¹, Takashi Suemasu¹ (1.Univ. of Tsukuba)

〇Takahiro Suzuki¹, Ryo Yokogawa^1,4, Nobuaki Mino¹, Kazuya Takahashi², Katsuhiko Komori², Tamotsu Morimoto³, Naomi Sawamoto¹, Atsushi Ogura¹ (1.Meiji Univ., 2.Tokyo Electron Tohoku Ltd., 3.Tokyo Electron Ltd., 4.JSPS Research Fellow)

〇Riichiro Takaishi¹, Kiwamu Sakuma¹, Takanori Asano¹, Masumi Saito¹, Hiroki Tanaka¹, Yukiko Daigo², Yutaka Fukushima² (1.Toshiba Corp., 2.Toshiba Nanoanalysis Corp.)

〇Yuji Okamoto^1,2, Daiki Tsutsumi³, Takamasa Ishigaki³, Fatima Zohra Dahmani⁴, Masatomo Sumiya¹ (1.NIMS, 2.Tsukuba Univ., 3.Hosei Univ., 4.USTO-MB)

〇Tatsuya Okada¹, Futa Gakiya¹, Yuya Ishiki¹, Takashi Noguchi¹ (1.Univ. Ryukyus)

〇Tatsuki Hieda¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

〇Wataru Nakano¹, Hiroaki Hanafusa¹, Seiichiro Higashi¹ (1.Hiroshima Univ.)

〇Nobuo Sasaki^1,2, Yukiharu Uraoka², Muhammad Arif² (1.Sasaki Consulting, 2.NAIST)

〇(DC)Thuy Thi Nguyen¹, Mitsuhisa Hiraiwa¹, Tomoyuki Koganezawa², Satoshi Yasuno², Shin-Ichiro Kuroki¹ (1.Hiroshima Univ., 2.SPring-8)

〇Gosuke Yachida¹, Koudai Inoue¹, Yasushi Hoshino¹, Jyoji Nakata¹ (1.Kanagawa Univ.)

〇(M1)Tatsuhiro Ogawa¹, Kotarou Natori¹, Takuya Hoshii¹, Masashi Nakatake², Yoshio Watanabe², Kuniyuki Kakushima¹, Hitoshi Wakabayashi¹, Kazuo Tsutsui¹ (1.Tokyo Tech, 2.Aichi Synchrotron Radiation Center)

〇(M2)Ryotaro Kiga¹, Masashi Uematsu^1,2, Kohei Itoh^1,2 (1.Keio Univ., 2.Keio Univ. TCAD Research and Development Center)

〇(D)Yuan Tu¹, Yasuo Shimizu¹, Masao Inoue², Yorinobu Kunimune³, Yasuhiro Shimada³, Toshiharu Katayama³, Takashi Ide³, Koji Inoue¹, Yasuyoshi Nagai¹ (1.IMR, Tohoku Univ., 2.Renesas Electronics Corp., 3.Renesas Semiconductor Manufacturing Co., Ltd.)

〇Jihee Jeon¹, Akihiro Suzuki^1,2, Kouta Takahashi^1,2, Osamu Nakatsuka^1,3, Shigeaki Zaima³ (1.Grad. Sch. of Eng., Nagoya Univ.,, 2.Research Fellow of JSPS, 3.IMaSS, Nagoya Univ.)

〇Kazuhiko Fuse¹, Hideaki Tanimura¹, Takayuki Aoyama¹, Shinichi Kato¹, Ippei Kobayashi¹ (1.SCREEN)

〇Shuichi Noda¹, Yosuke Tanimoto², Takuya Ozaki¹, Hideyuki Kurihara², Yasuyuki Hoshino², Kazuhiko Endo^1,3, Seiji Samukawa^1,2 (1.Tohoku Univ., 2.SHOWA DENKO, 3.AIST)

〇(M1)Kenta Kimoto¹, Norihisa Takei¹, Hiroaki Kakiuchi¹, Kiyoshi Yasutake¹, Hiromasa Ohmi¹ (1.Osaka Univ.)

〇Ryo Yokogawa^1,3, Shuichiro Hashimoto², Motohiro Tomita^1,2,4, Takanobu Watanabe², Atsushi Ogura¹ (1.Meiji Univ., 2.Waseda Univ., 3.JSPS Research Fellow DC, 4.JSPS Research Fellow PD)

〇(M1)Toshiki Nishimoto¹, Takashi Nakayama¹ (1.Chiba Univ.)

〇Akihiro Suzuki^1,2, Osamu Nakatsuka^1,3, Mitsuo Sakashita¹, Shigeaki Zaima³ (1.Grad. Sch. of Eng., Nagoya Univ., 2.Research Fellow of JSPS, 3.IMaSS, Nagoya Univ.)

〇(M1)Xuan Luo¹, Tomonori Nishimura¹, Takeaki Yajima¹, Akira Toriumi¹ (1.The Univ. of Tokyo)

〇Yukiko Daigo¹, Hiroki Tanaka², Harumi Seki², Riichiro Takaishi², Amika Shima¹, Norihito Mayama¹, Tomokazu Sasaki¹, Yutaka Fukushima¹ (1.Toshiba Nanoanalysis Corp., 2.Toshiba Corp.)

〇(PC)Maria Balois¹, Lean Dasallas², Oussama Moutanabbir³, Takuo Tanaka¹, Norihiko Hayazawa^1,4 (1.Photon Team - RIKEN, 2.NIP - UP, 3.Ecole P. Montreal, 4.SISL - RIKEN)

〇Yoshiro Kumagai¹, Masahiro Watanabe¹ (1.Tokyo Tech.)

〇Wataru Itaya¹, Kohei Nakae¹, Keisuke Yamamoto¹, Dong Wang¹, Hiroshi Nakashima² (1.Interdisciplinary Graduate School of Engineering Sciences, Kyushu Univ., 2.GIC, Kyushu Univ.)

〇Yan Wu¹, Yuhta Iwanami¹, Yoshihiro Takahashi¹ (1.CST, Nihon Univ.)

〇(M2)Mitsuki Kuwabara¹, Natsumi Tanaka¹, Yasushi Takahashi¹ (1.Osaka Pref. Univ.)

〇Hiroki Utsumi¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

〇(B)Yuki Matsumae¹, Yoshio Uhara¹, Masatoshi Ito¹, Sigeru Saito¹ (1.TUS)

〇Masahiro Nagata¹, Ryouya Shirahama¹, Sethavut Duangchan¹, Akiyoshi Baba¹ (1.Kyushu Inst.)

〇Norio Ishitsuka¹, Noriyuki Sakuma¹ (1.HItachi R&D Group)

〇Masayoshi Nagao¹, Naoki Inoue², Yoshinori Takao², Noriyuki Tatsumi¹, Katsuhisa Murakami¹, Sommawan Khumpang^1,3, Shiro Hara^1,3 (1.AIST, 2.YNU, 3.MINIMAL)

〇Haruichi Kanaya¹, Yuki Yamashita¹, Kota Tsugami¹, Atsuhiro Hamasawa¹ (1.Kyushu Univ.)

〇Daisuke Yamane^1,3, Toshifumi Konishi^1,2,3, Teruaki Safu², Koichiro Tachibana^1,3, Minami Teranishi^1,3, Chun-Yi Chen^1,3, Tso-Fu Mark Chang^1,3, Masato Sone^1,3, Katsuyuki Machida^1,3, Kazuya Masu^1,3 (1.Tokyo Tech., 2.NTT-AT, 3.JST-CREST)

〇Motohiro Takayasu^1,3, Shiro Dosho^1,3, Hiroyuki Ito^1,3, Daisuke Yamane^1,3, Toshifumi Konishi^1,2,3, Katsuyuki Machida^1,3, Noboru Ishihara^1,3, Kazuya Masu^1,3 (1.Tokyo Tech., 2.NTT-AT, 3.JST-CREST)

〇Ippei Tsuji^1,3, Motohiro Takayasu^1,3, Hiroyuki Ito^1,3, Daisuke Yamane^1,3, Shiro Dosho^1,3, Toshifumi Konishi^1,2,3, Noboru Ishihara^1,3, Katsuyuki Machida^1,3, Kazuya Masu^1,3 (1.Tokyo Tech., 2.NTT-AT, 3.JST-CREST)

〇Tatsuya Koga^1,3, Ippei Tsuji^1,3, Motohiro Takayasu^1,3, Hiroyuki Ito^1,3, Daisuke Yamane^1,3, Shiro Dosho^1,3, Toshifumi Konishi^1,2,3, Noboru Ishihara^1,3, Katsuyuki Machida^1,3, Kazuya Masu^1,3 (1.Tokyo Tech, 2.NTT-AT, 3.JST-CREST)

〇Daisuke Matsumura¹, Yoko Yamanishi¹, Takashi Ogawara², Yoshikazu Haramoto³ (1.Kyushu Univ, 2.Boyle, 3.AIST)

Junya Maeda¹, Yuuki Hirakawa¹, Tomoaki Kageyama¹, Yoshiharu Okamoto¹, 〇Sangseok Lee¹ (1.Tottori University)

〇Shuhei Onishi¹, Yong Joon Choi¹, Makoto Ishida¹, Kazuaki Sawada¹, Hiromu Ishii¹, Katsuyuki Machida², Kazuya Masu², Yasuhiko Nikaido³, Mitsumasa Saito³, Sinichi Yoshida⁴ (1.Toyohashi Univ., 2.Tokyo Institute of Technology, 3.Univ. of Occupational and Environmental Health, 4.Fukuoka Megumi Hospital)