The 78th JSAP Autumn Meeting, 2017

Presentation information

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[6a-C21-1~12] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Wed. Sep 6, 2017 9:15 AM - 12:15 PM C21 (C21)

Kazuyoshi Ueno(Shibaura Inst. of Tech), Masahide Goto(NHK)

12:00 PM - 12:15 PM

[6a-C21-12] Plasma Treatment Carrier Device for Bio-Samples

Katsuki Tsukasaki1, Shinya Kumagai1, 〇Minoru Sasaki1 (1.Toyota Technol. Inst.)

Keywords:Plasma Treatment, Bio-sample, Carrier Device

We developed a plasma treatment carrier device. This device brings cells to where a non-thermal atmospheric pressure plasma (NTAPP) was generated in an experimental setup. Using the device,
the pollen was exposed to NTAPP. The exposure induced no apparent changes on the pollen. The pollen was incubated on agar. We found that short exposure increased germination rates of pollen but long exposure increased.