The 78th JSAP Autumn Meeting, 2017

Presentation information

Print

Oral presentation

13 Semiconductors » 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

[7a-C21-1~13] 13.4 Si wafer processing /Si based thin film /Interconnect technology/ MEMS/ Integration technology

Thu. Sep 7, 2017 9:00 AM - 12:30 PM C21 (C21)

Takashi Noguchi(Univ. of the Ryukyus), Taizoh Sadoh(Kyushu Univ.)

9:30 AM - 9:45 AM

△ [7a-C21-3] Low-temperature synthesis of high hole mobility (380 cm2/Vs) Ge thin films on glass

〇Ryota Yoshimine1, Kaoru Toko1, Takashi Suemasu1 (1.Univ. of Tsukuba)

Keywords:Germanium, solid-phase crystallization