The 78th JSAP Autumn Meeting, 2017

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8 Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[7p-A402-7~23] 8.3 Plasma deposition of thin film and surface treatment

Thu. Sep 7, 2017 3:00 PM - 7:30 PM A402 (402+403)

Yasushi Inoue(Chiba Inst. of Tech.), Yasunori Ohtsu(Saga Univ.)

3:45 PM - 4:00 PM

[7p-A402-10] Formation of High-Mobility IGZO Thin Film Transistors with Plasma Enhanced Reactive Sputter Deposition (II)

Yuichi Setsuhara1, Masashi Endo1, 〇Kosuke Takenaka1, Giichiro Uchida1, Akinori Ebe2 (1.Osaka Univ., 2.EMD Corp.)

Keywords:IGZO