[7p-A402-7~23] 8.3 Plasma deposition of thin film and surface treatment

[7p-A402-19] Study on the low temperature synthesis of graphene using a blowing-type plasma

〇Jaeho Kim¹, Hajime Sakakita¹, Hirotomo Itagaki¹ (1.AIST)

Keywords:graphene, plasma CVD, nano carbon

In this work, we have been developed an advanced plasma CVD technology for the low-temperature synthesis of large-area and high-quality graphene films using a blowing-type plasma. In this talk, the plasma CVD technology and our recent experimental results will be presented.