Low-Temperature Crystallization of Group-IV Semiconductors on Insulator by Catalytic Effects

Taizoh Sadoh; Masanobu Miyao; Isao Tsunoda

Presentation information

Symposium (Oral)

Symposium » Film Formation and Low Temperature of IV Element Semiconductor

[7p-C18-1~11] Film Formation and Low Temperature of IV Element Semiconductor

Thu. Sep 7, 2017 1:30 PM - 6:30 PM C18 (C18)

Takashi Noguchi(Univ. of the Ryukyus), Naoto Matsuo(Univ. of Hyogo), Seiichiro Higashi(Hiroshima Univ.)

5:45 PM - 6:15 PM

[7p-C18-10] Low-Temperature Crystallization of Group-IV Semiconductors on Insulator by Catalytic Effects

〇Taizoh Sadoh¹, Masanobu Miyao¹, Isao Tsunoda² (1.Kyushu Univ., 2.NIT, Kumamoto Coll.)

Keywords:semiconductor, metal-induced crystallization, flexible electronics

Metal-induced crystallization of group-IV semiconductors on insulator is useful to realize advanced flexible electronics. We will discuss effects of metal species, electric-field, stress, and bond-modulation in amorphous films on crystallization of group-IV semiconductors.