Electrical Characteristics and Crystal Structure for MoSi<sub>2</sub>-Si Composite Thin Films<br /> Deposited by rf Magnetron Sputtering

Presentation information

Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PA2 (P)

9:30 AM - 11:30 AM

〇Shungo Tanimoto¹, Kosuke Shimozono¹, Yuuki Sato¹, Tadashi Ohachi¹, Shinzo Yoshikado¹ (1.Doshisha Univ.)

Keywords:MoSi2