The 78th JSAP Autumn Meeting, 2017

Presentation information

Poster presentation

8 Plasma Electronics » 8.3 Plasma deposition of thin film and surface treatment

[8a-PB4-1~20] 8.3 Plasma deposition of thin film and surface treatment

Fri. Sep 8, 2017 9:30 AM - 11:30 AM PB4 (P)

9:30 AM - 11:30 AM

[8a-PB4-3] Preparation of AZO thin film on Polycarbonate by RF sputtering and its application

Kosei Sugawara1, Yasunori Ohtsu1 (1.Saga Univ.)

Keywords:plasma, sputtering, AZO