Reo Kometani

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

3:00 PM - 3:15 PM

[14p-423-8] Local nanopatterning by self-assembly/electron beam combined lithography

〇Reo Kometani¹, Kei Nishikawa¹, Etsuo Maeda¹ (1.The Univ. of Tokyo)