Masahito Kurouchi

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Speaker, Author, Co-Author

Tue. Mar 14, 2017 1:15 PM - 5:00 PM 423 (423)

Oral presentation
| CS Code-sharing session
| CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

[14p-423-1~14] CS.4 7. Code-sharing Session: Beam Technology and Nanofabrication

3:30 PM - 3:45 PM

[14p-423-9] Investigation of 2-variable 2nd-order Approximation Model on Line-and-space Pattern Formed by Electron Beam Exposure System

〇Masahito Kurouchi¹, Manabu Yasui¹, Takeshi Ozawa¹ (1.Kanagawa Ind. Tech. Center)